Narrow gap reactive ion etching system 狭窄间隙反应性离子蚀刻系统
Reactive ion etching system rie system 反应性离子蚀刻系统
The reactor is capable of working in the rie ( reactive ion etching ) mode and also in the plasma etching mode 反应腔拥有在rie (反应离子刻蚀)模式和等离子刻蚀模式下工作的能力。
Yak hairs were treated by the microwave electron cyclotron resonance plasma reactive ion etching ( ecr - rie ) equipment to improve its property of weave 摘要采用微波电子回旋共振等离子体反应离子刻蚀( ecr - rie )装置对牦牛毛纤维进行表面改性,从而改善牦牛毛的可纺性。
Kionix manufactures inertial sensors using plasma micromachining , a highly - refined , proprietary , deep reactive ion etch drie fabrication technology . the resulting products are ultra - small mechanical elements integrated with electronics to create microelectromechanical systems mems Kionix的惯性sensor采用的plasma微机电制程,是一种经高度改良且有独家专利制程,使产品的机械结构部份做到最小并同时与电子电路结合形成一先进的微机电产品